High flow rate bubbler system and method
AssigneeAviza Technology, Inc.
InventorAmir Torkaman
Life of this patent
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Abstract
A high flow rate bubbler system and method are provided for producing a stable, easily controllable source of chemical vapors to a downstream process. The bubbler system is equipped with a vaporizer unit connected to its gas outlet tube. This vaporizer unit slows the gas velocity to enhance settling of entrained droplets and contacts the exiting gas with a high thermal mass, heated surfaces to promote heat transfer and evaporation of the entrained droplets.
Claims26
A high flow rate bubbler system comprising:
- a bubbler chamber containing a liquid chemical;
- a gas inlet for delivering carrier gas to the liquid inside said bubbler chamber
- a gas outlet conveying carrier gas and chemical vapors out of said bubbler chamber;
- and
- a vaporizer unit through which carrier gas and chemical vapors exiting said bubbler chamber pass, said vaporizer unit comprising one or more heated surfaces of substantial thermal mass oriented such that gases passing through said vaporizer unit contact said heated surfaces for a sufficient time to remove entrained liquid droplets, and said vaporizer unit having a substantial cross sectional area perpendicular to the direction of gas flow such that the gas velocity is substantially slowed.
A vaporizer unit for substantially removing entrained liquid chemical droplets from a flowing gas comprising:
- a flow chamber through which the general direction of gas flow is from a first side to an opposing second side of said flow chamber, said flow chamber having one or more walls formed of a high thermal mass, heat conducting material, said flow chamber having a cross sectional area perpendicular to the direction of gas flow sufficient to substantially reduce drag on entrained droplets, said flow chamber having a large internal surface area;
- and
- a temperature controlled heat source coupled to said chamber for elevating and maintaining the temperature of said flow chamber walls and internal surface area.
A method for substantially removing entrained liquid chemical droplets from a carrier gas produced from a high speed bubbler system to a downstream process comprising the steps of:
- supplying carrier gas to a bubbler chamber wherein the carrier gas forms bubbles in a liquid chemical;
- and
- passing carrier gas exiting the bubbler chamber through a vaporizer unit that removes entrained liquid droplets from the carrier gas by slowing the flow velocity of the gas and bringing it into close contact with one or more high thermal mass surfaces that are held at an elevated temperature.
Dependencies are inferred from the claim text.