Back to results
US 2003/0113488 A1Published application
Device for holding a molten semiconductor material
AssigneeWacker Siltronic AG
InventorErich Tomzig
Life of this patent
Estimating the term…
Abstract
A device for holding a molten semiconductor material, includes a crucible made from quartz glass and a susceptor which at least partially comprises CFC and which supports the crucible and an inner surface having a base, a cylindrical section and a curved section between the base and the cylindrical section, and a thin, sheet-like and flexibly deformable graphite film which is arranged between the crucible and the susceptor and forms a gastight barrier.
Claims16
A device for holding a molten semiconductor material, comprising
- a crucible made from quartz glass;
- a susceptor which at least partially comprises CFC and which supports the crucible and comprises an inner surface having a base, a cylindrical section and a curved section between the base and the cylindrical section;
- and
- a thin, sheet-like and flexibly deformable graphite film which is arranged between the crucible and the susceptor and said graphite film forms a gastight barrier.
1 more element
Dependencies are inferred from the claim text.