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US 2003/0112578 A1Published application
Tuneable ferroelectric decoupling capacitor
AssigneeInternational Business Machines Corporation
InventorsThomas M. Shaw, W. David Pricer, Deborah A. Neumayer, John D. Baniecki, Robert B. Laibowitz
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Abstract
A voltage supply bypass capacitor for use with a semiconductor integrated circuit chip or module comprising a ferroelectric dielectric having electromechanical properties designed to provide maximum losses at selected frequencies.
Claims18
A ferroelectric dielectric voltage supply bypass capacitor having electromechanical properties designed to provide losses at selected frequencies.
A tuneable semiconductor capacitor comprising:
- a semiconductor substrate;
- a first layer of conducting material to form a first electrode;
- a layer of ferroelectric material which is deposited on the first electrode;
- an upper layer of conducting material deposited on the layer of ferroelectric material to form a second electrode, wherein the distance between the first and second electrode is thickness D and the area of the ferroelectric material is A, and whereby the resonance frequency of the capacitor is determined by the D and A dimensions.
1 more element
Dependencies are inferred from the claim text.