Temperature adjusting system in exposure apparatus

A temperature adjusting system, comprising:

• a blowing outlet port for supplying a medium into a subject to be temperature controlled;
• first temperature measuring means for measuring a temperature adjacent said blowing outlet port;
• a first temperature controller for performing negative feedback of an output of said first temperature measuring means;
• second temperature measuring means for measuring a temperature of a temperature control space which is downstream of said blowing outlet port;
• a second temperature controller for performing negative feedback of an output of said second temperature measuring means;
• and
• temperature converting means for controlling an amount of heat generation on the basis of an output of said first temperature controller so that a medium being controlled at a constant temperature is supplied into said temperature control space from said blowing outlet port;
• wherein a predetermined temperature set value corresponding to a desired value for the temperature for said temperature control space is inputted to said second temperature controller, and wherein an output of said second temperature controller is inputted as a temperature set value for said first temperature controller.

A non-interference type temperature adjusting control system, comprising:

• temperature converting means for variably changing a temperature of a medium to be supplied into a controlled subject;
• a plurality of first temperature measuring means for measuring the temperature of the medium adjusted by said temperature converting means;
• a plurality of second temperature measuring means for measuring a temperature of the controlled subject;
• a minor loop system including a feedback system for actuating said temperature converting means on the basis of outputs of said first temperature measuring means;
• mode temperature calculating means for calculating an average temperature and a gradient temperature of the controlled subject on the basis of outputs of said first temperature measuring means;
• and
• distributing means for producing an output to said minor loop system in response to a signal obtainable by compensation to an output of said mode temperature calculating means.

An exposure apparatus, comprising:

• transferring means for transferring a pattern of an original onto a substrate;
• and
• a temperature adjusting system including (i) a blowing outlet port for supplying a medium into a subject to be temperature controlled, (ii) first temperature measuring means for measuring a temperature at said blowing outlet port, (iii) a first temperature controller for performing compensation operation in response to an output of said first temperature measuring means, (iv) second temperature measuring means for measuring a temperature of a temperature control space which is downstream of said blowing outlet port, (v) a second temperature controller for performing compensation operation in response to an output of said second temperature measuring means, and (vi) temperature converting means for controlling an amount of heat generation on the basis of an output of said first temperature controller so that a medium being controlled at a constant temperature is supplied into said temperature control space from said blowing outlet port;
• wherein a predetermined temperature set value corresponding to a desired value for the temperature for said temperature control space is inputted to said second temperature controller, and wherein an output of said second temperature controller is inputted to said first temperature controller as a temperature set value for said first temperature controller.