Substrate receiving apparatus and method thereof
AssigneeLG.Philips LCD Co., Ltd.
InventorKap Ryol Park
Life of this patent
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Abstract
A substrate receiving apparatus and a method thereof that prevents substrate damage from occurring when a substrate is loaded/unloaded on/from a cassette. The present invention includes a cassette having a plurality of plates inside so as to receive a plurality of substrates; a cassette loading unit uploading/downloading the cassette; a port supporting the cassette loading unit; and a plurality of auxiliary plates inserted inside the cassette from outside. The method includes downloading a cassette so as to move substrates from plates of the cassette to auxiliary plates, unloading and loading the substrates placed on the auxiliary plates from/on the cassette, and uploading the cassette so as to move the substrates from the auxiliary plates to the plates of the cassette.
Claims20
A substrate receiving apparatus comprising:
- a cassette having a plurality of plates inside so as to receive a plurality of substrates;
- a cassette loading unit uploading and downloading the cassette;
- a port supporting the cassette loading unit;
- and
- a plurality of auxiliary plates inserted inside the cassette from outside the cassette.
A method for receiving a substrate comprising:
- downloading a cassette so as to move substrates from plates of the cassette to auxiliary plates;
- unloading and loading the substrates on the auxiliary plates from/on the cassette;
- and
- uploading the cassette so as to move the substrates from the auxiliary plates to the plates of the cassette.
A glass substrate etching apparatus comprising:
- a substrate;
- an etching unit containing an etchant;
- an etch ant recycling unit removing impurities from the etchant;
- a deionized supply unit containing deionized water;
- an undiluted etchant supply unit containing undiluted etchant;
- an etchant mixing unit mixing the deionized water, the undiluted etchant, and the impurity-removed etchant;
- an etchant heating unit heating the mixed etchant;
- and
- a cleaning unit removing the etchant remaining on the substrate;
- wherein the etching unit, the etchant heating unit, the etchant mixing unit, and the etchant recycling unit are connected to each other through pipes;
- and
- wherein the deionized supply unit and the undiluted etchant supply unit are both connected to the etchant mixing unit through pipes.
Dependencies are inferred from the claim text.