Loading patent…
AssigneeNational Inst. of Advanced Ind. Science and Tech.
InventorHidehiko Yashiro
Estimating the term…
A method for the elimination of high-energy ion in an EUV light-radiating device includes irradiating a first target with a first exciting laser to produce a laser-produced plasma EUV light source and causing a high-energy ion generated simultaneously with EUV light to collide against plasma produced by irradiating a second target with a second laser to separate the high-energy ion from the orbit of the EUV light. An apparatus for the elimination of a high-energy ion in an EUV light-radiating device includes a device for irradiating a first target with a first exciting laser to produce a plasma EUV light source and induce emission of EUV light, a device for irradiating a second target with a second laser to produce plasma, and a device for causing a high-energy ion generated simultaneously with the EUV light to be delayed by difference between an ion flight time and plasma expansion time for ion elimination and collide against the plasma to separate the high-energy ion from the orbit of the EUV light.
A method for the elimination of a high-energy ion in an EUV light-radiating device, which comprises irradiating a first target with a first exciting laser to produce a laser-produced plasma EUV light source and causing a high-energy ion generated simultaneously with EUV light to collide against plasma produced by irradiating a second target with a second laser to separate said high-energy ion from an orbit of said EUV light.
An apparatus for the elimination of a high-energy ion in an EUV light-radiating device, comprising means for irradiating a first target with a first exciting laser to produce a plasma EUV light source and induce emission of EUV light, means for irradiating a second target with a second laser to produce plasma, and means for effecting passage of said EUV light and subsequently causing said high-energy ion entrained by said EUV light to collide against said plasma to separate said high-energy ion from an orbit of said EUV light.
Dependencies are inferred from the claim text.