Substrate support and method of fabricating the same

A method of fabricating a substrate support comprising:

• assembling a subassembly comprising a stud disposed through a heating element sandwiched between a first reinforcing member and a second reinforcing member;
• supporting the subassembly above a bottom of a mold;
• encapsulating the subassembly in the mold with molten aluminum for form a casting;
• forming a hole in the casting by removing at least a portion of the stud;
• and
• disposing a plug in at least a portion of the hole.

A method of fabricating a substrate support comprising:

• assembling a subassembly comprising a heating element held between a first reinforcing member and a second reinforcing member by a plurality of studs;
• coupling a backplate to the subassembly in a spaced-apart relation of at least 40 mm;
• casting the subassembly supported in a mold with molten aluminum in one shot;
• applying pressure to the molten aluminum;
• and
• removing at least a portion of the stud surrounding the casted subassembly.

A substrate support comprising:

• a casted aluminum body having an outer surface;
• a heating element embedded in the body;
• a first reinforcing member embedded in the body;
• at least one holed formed within the body between the outer surface and at least the heating element or the first reinforcing member;
• and
• a plug disposed in the hole between the outer surface and the heating element or the first reinforcing member.

A substrate support fabricated by a process comprising:

• disposing a first reinforcing member and a heating element on a stud to form a subassembly;
• encapsulating the subassembly in a mold with molten aluminum to form a casting;
• and
• finishing the casting by removing at least a portion of the stud.