Column for a charged particle beam device
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorPavel Adamec
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Abstract
The invention provides an improved column for a charged particle beam device. The column comprises deflectors for scanning the beam over the specimen, for aligning the beam with regard to the objective and for compensating aberrations caused by the objective. Thereby, the total number of electrode arrangements and/or coil arrangements that are used for the deflectors and that are independently controllable, is 8 or less.
Claims20
A column for a charged particle beam device, which is used to examine or to modify a specimen, said column comprising:
- a) a particle source for providing a beam of charged particles,
- b) an objective for focussing the beam onto the specimen, and
- c) deflectors for scanning the beam over the specimen, for aligning the beam with regard to the objective and for compensating aberrations caused by the objective, wherein the total number of electrode arrangements and/or coil arrangements that are used for the deflectors and that are independently controllable, is 8 or less.
The column according to one of the preceding claims, wherein the objective is an electrostatic objective lens.
A deflector for a charged particle beam device, which is used to examine or to modify a specimen, said deflector comprising four electrode arrangements wherein each electrode arrangement consists of three single electrodes, each electrode having the shape of a ring segment, and wherein the four electrode arrangements are positioned along a ring in a manner that between each pair of electrodes from one electrode arrangement an electrode from another electrode arrangement is located.
A deflector for a charged particle beam device, which is used to examine or to modify a specimen, said deflector comprising four coils wherein two coils are positioned along a first ring and two coils are positioned along a second ring, being concentric with the first ring and having a larger diameter than the first ring, in a manner that when viewed from the center of the rings every coil positioned on the first ring overlaps with the two coils positioned on the second ring.
Dependencies are inferred from the claim text.