A diffraction pattern intensity correction program for use with an image analysis device having a fluorescent screen for creating a diffraction pattern that results from reflection high-energy electron diffraction, a photoreceptor for optically acquiring the diffraction pattern that appears on the fluorescent screen, and a halation-prevention filter for location along a light path connecting the fluorescent screen and the photoreceptor, in which a transmittance of the visible light transmitted through the filter is minimum at a center of the filter and increases with a distance from the center, the program comprising:
- a measured intensity storage means for storing an intensity of visible light emitted from the diffraction pattern on the fluorescent screen as a result of reflection high-energy electron diffraction, passed through the halation-prevention filter and detected by the photoreceptor means;
- an intensity decrease rate storage means for storing a rate of decrease in the intensity of the visible light transmitted through the halation-prevention filter;
- and
- a corrected-intensity computation means for computing a corrected intensity of the diffraction pattern by correcting the intensity stored by the measured intensity storage means, based on the decrease rate stored by the intensity decrease rate storage means.