Method and apparatus for providing an electrochemical gas sensor having a porous electrolyte
AssigneePerkinElmer Instruments LLC
InventorsAvinash Dalmia, Otto J. Prohaska
Life of this patent
Estimating the term…
Abstract
The invention relates to an electrochemical gas sensor having improved response time and sensitivity. The electrochemical gas sensor includes a substrate for providing a surface upon which an electrode may be placed, a first electrode placed on the surface, a thin film of electrolyte support for receiving electrolyte and having a predetermined porosity, and a second electrode deposited on the thin film for permitting a measurement of current between the first and second electrodes.
Claims23
An electrochemical gas sensor, comprising:
- a substrate having a surface;
- a first electrode deposited on said surface;
- a second electrode spaced apart from said surface;
- and
- an electrolyte support placed between said surface and said second electrode and having a predetermined porosity.
A method for providing an electrochemical gas sensor, comprising:
- providing a substrate;
- depositing a first electrode on said substrate;
- depositing an electrolyte support on said first electrode and said substrate for forming a plurality of columns;
- capping said electrolyte support;
- and
- depositing a second electrode on said capped electrolyte support.
A method for providing an electrochemical sensor, comprising:
- providing a substrate;
- directing a vapor for an electrolyte support towards said substrate in a generally angular direction for forming a plurality of columns;
- and
- rotating the substrate about an axis generally parallel to a plane of the substrate for capping the plurality of columns.
Dependencies are inferred from the claim text.