Organic polymers for bottom antireflective coating, process for preparing the same, and compositions containing the same

A binder polymer has repeating units in a main chain including co- to quatro-, a structural formula of said binder polymer represents as below:

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• wherein, R1˜R7 independently represent hydrogen, methoxy, hydroxy, halogen, aldehyde,
• C1˜C6 represent alkoxyalkyl or C1˜C5 represent alkoxyalkane, p1 R8, R9 and R10 represent hydrogen or methyl group,
• R11 and x represent C1˜C6 alkyl group, and
• mol ratio of each monomer is that k is 0.1˜0.5, l and m are 0.0˜0.4 and n is 0.3˜0.6 based on a total molar feed ratio of component k+l+m+n.

A composition of bottom antireflective coating material for processing semiconductor comprises:

• binder polymer represented by a following structural formula,
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• alkylated aminoplast crosslinker,
• an active or latent protonic acid catalyst for curing, and
• a low-to-medium boiling point alcohol-containing solvent,
• wherein, R1˜R7 independently represent hydrogen, methoxy, hydroxy, halogen, aldehyde,
• C1˜C6 represent alkoxyalkyl or C1˜C5 represent alkoxyalkane,
• R8, R9 and R10 represent hydrogen or methyl group,
• R11 and x represent C1˜C6 alkyl group, and
• mol ratio of each monomer is that k is 0.1˜0.5, l and m are 0.0˜0.4 and n is 0.3˜0.6 based on a total molar feed ratio of component k+l+m+n.

A semiconductor device containing a bottom antireflective coating material for using semiconductor fabrication, a structural formula of said semiconductor device represents:

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• wherein, said bottom antireflective coating material is made of a binder polymer
• an acid catalyzed crosslinker and a low-to-medium boiling point alcohol-containing solvent, and
• wherein, R1˜R7 independently represent hydrogen, methoxy, hydroxy, halogen, aldehyde,
• C1˜C6 represent alkoxyalkyl or C1˜C5 represent alkoxyalkane,
• R8, R9 and R10 represent hydrogen or methyl group,
• R11 and x represent C1˜C6 alkyl group, and
• mol ratio of each monomer is that k is 0.1˜0.5, l and m are 0.0˜0.4 and n is 0.3˜0.6 based on a total molar feed ratio of component k+l+m+n.

A method for synthesizing an isoflavonyl methyl (meth) acrylate represented by a following chemical formula comprises steps of:

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• dissolving 7-hydroxyisoflavone derivatives into pyridine,
• stirring solution for two to seven hours at temperature of 4° C. by gradually adding methacryloyl chloride,
• extracting filtered reactant several times with organic solvent,
• refining extracted reactant, and
• drying product in a vacuum for recovering isoflavonyl methacrylate.

A method for synthesizing a binder polymer having repeating units in a main chain, including co- to quatro-, with a solution comprising a polymerization solvent selected from a group of dioxane, tetrahydrofuran, methylethylketone or aromatic solvent and a radical initiator selected from a group of benzoil peroxide (BPO), 2,2′-azobisisobutyronitrile (AIBN) or Di-tert-butyl peroxide (DTBP), and represented by a following structural formula, comprises steps of:

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• dissolving monomer being selected from a group of substituted or unsubstituted isoflavone chromophore monomer, hydroxyalkylmaleimide monomer, hydroxyalkylmethacrylate monomer, alkylmethacrylate monomer and 1˜10 mol % of radical initiator with a solvent,
• polymerizing for 2˜10 hours at temperature of 60° C. in a nitrogen environment,
• filtering and drying for synthesizing binder polymer,
• wherein, R1˜R7 independently represent hydrogen, methoxy, hydroxy, halogen, aldehyde,
• C1˜C6 represent alkoxyalkyl or
• C1˜C5 represent alkoxyalkane,
• R8, R9 and R10 represent hydrogen or methyl group,
• R11 and x represent C1˜C6 alkyl group, and
• mol ratio of each monomer is that k is 0.1˜0.5, l and m are 0.0˜0.4 and n is 0.3˜0.6 based on a total molar feed ratio of component k+l+m+n.

A method for producing an antireflective coating layer containing a binder polymer represented by a following structural formula comprises steps of:

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• dissolving said polymer in a solvent being selected from a group consisting of propyleneglycol monomethylether acetate (PGMEA), ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, and cyclohexanone;
• spin-coating a solution on a silicone wafer;
• baking at from about 110° C. to 250° C. for 30 to 120 seconds;
• and
• over-coating a photoresist;
• wherein, R1˜R7 independently represent hydrogen, methoxy, hydroxy, halogen, aldehyde,
• C1˜C6 represent alkoxyalkyl or
• C1˜C5 represent alkoxyalkane,
• R8, R9 and R10 represent hydrogen or methyl group,
• R11 and x represent C1˜C6 alkyl group, and
• mol ratio of each monomer is that k is 0.1˜0.5, l and m are 0.0˜0.4 and n is 0.3˜0.6 based on a total molar feed ratio of component k+l+m+n.