Silicon-on-insulator optical waveguide Michelson interferometer sensor for temperature monitoring

A silicon-on-insulator optical waveguide Michelson interferometer temperature sensor, comprising a silicon-on-insulator waveguide coupler, two silicon-on-insulator waveguide Bragg gratings, a laser, an optical power detector, a microprocessor;

• said silicon-on-insulator waveguide coupler comprising a single mode ridge-type waveguide, a single mode S-type ridge waveguide, a single mode parallel-coupling waveguide, a silicon guiding layer, a silicon dioxide insulator layer and a silicon substrate;
• said silicon-on-insulator waveguide Bragg grating comprising an amorphous silicon layer, a sinusoidal grating in silicon layer, a SiO2 insulator layer and a silicon substrate, wherein said silicon dioxide insulator layer being covered by said sinusoidal grating in silicon layer, and said sinusoidal grating in silicon layer being covered by said amorphous silicon layer;
• when light passes through said silicon-on-insulator waveguide coupler, the light goes through the two Bragg gratings and being reflected to the waveguide coupler, an interference spectrum is detected, the peak of the spectrum of the reflected light will be varied according to the temperature to be measured, therefore the temperature to be measured can be obtained by using said light power detector to detect said spectrum.