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AssigneeSamsung Electronics Co., Ltd.
InventorIl Kwon Sin
Estimating the term…
There is provided an alarm apparatus for checking an amount of electric current supplied to each of the lamps of a wafer etching equipment and timely exchanging defective lamps if the amount of the current is less than a predetermined level, thereby minimizing process failures. The alarm apparatus includes a plurality of lamps provided above a dome cover of a reaction chamber to uniformly maintain a constant temperature of the dome cover, current quantity detecting devices provided on each of electric lines supplying electric power to each of the lamps, a controller for checking the amount of electric current through each of the current quantity detecting devices to compare the detected amount of electric current with a predetermined amount of electric current, and an alarm indicating a proper time to exchange lamps having an amount of electric current less than the predetermined amount of electric current in response to a comparison result from the controller.
In a wafer etching apparatus having a reaction chamber including a dome cover, a plurality of lamps provided above the dome cover to uniformly and constantly maintain a temperature of the dome cover, and electric wires supplying electrical power to the lamps, an alarm apparatus for indicating a time to exchange at least one of the lamps, comprising:
An method for indicating a time for exchanging lamps of a wafer-etching device, the method comprising:
An alarm apparatus for wafer etching equipment including a reaction chamber having a dome cover, a plurality of lamps provided above the dome cover to uniformly and constantly maintain a temperature of the dome cover, and electric wires supplying electrical power to the lamps, the alarm apparatus comprising:
An method for indicating a time for exchanging at least one lamp of wafer-etching equipment, comprising:
Dependencies are inferred from the claim text.