Capacitive type physical quantity detecting sensor for detecting physical quantity along plural axes

A capacitive type physical quantity detecting sensor comprising:

• a plurality of physical quantity detection portions for detecting a physical quantity, each of the plurality of physical quantity detection portions respectively including:
• a movable electrode that moves based on a physical quantity change;
• a fixed electrode disposed to face the movable electrode;
• a control signal generator for generating control signals;
• a C-V converter for outputting a voltage that corresponds to a change in a capacitance formed between the movable electrode and the fixed electrode;
• and
• a signal processing circuit for processing the output voltage from the C-V converter and for outputting a signal corresponding to the physical quantity change;
• wherein the control signal generator transmits a first signal to the movable electrode and the fixed electrode to detect the change in the capacitance formed between the movable electrode and the fixed electrode during a normal physical quantity detection timing interval, and transmits a second signal to the movable electrode and the fixed electrode to move the movable electrode for diagnosing a malfunction of each of the plurality of physical quantity detection portions during a self diagnosis timing interval,
• wherein a first frequency of the second signal transmitted to a first one of the plurality of quantity detection portions is different from a second frequency of the second signal transmitted to a second one of the plurality of the physical quantity detection portions.