X-ray tube, x-ray generator, and inspection system
AssigneeHamamatsu Photonics K.K.
InventorsYutaka Ochiai, Tutomu Inazuru
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AssigneeHamamatsu Photonics K.K.
InventorsYutaka Ochiai, Tutomu Inazuru
Estimating the term…
An x-ray emitting window is formed at a front end face, and a taper surface tilted with respect to the x-ray emitting direction is formed near the emitting window, whereby an object to be inspected can be prevented from abutting against the front end face even if the object is pivoted about an axis intersecting the emitting direction while the object is disposed closer to the x-ray emitting window. As a consequence, while the object is disposed closer to the x-ray emitting position, the orientation of the object can be changed. Therefore, when inspecting the internal structure of the object and the like by irradiating the object with x-rays and detecting the x-rays transmitted through the object, not only a magnified penetration image of the object with a high magnification rate is obtained, but also the internal structure of the object and the like can be verified in detail by changing the orientation of the object.
An x-ray tube for emitting an x-ray, comprising:
An x-ray tube employed in an inspection system which inspects a state of an object to be inspected by emitting an x-ray toward said object and detecting the x-ray transmitted through said object, said inspection system being capable of adjusting an orientation of said object about an axis intersecting an emitting direction of said x-ray,
An x-ray generator including x-ray emitting means for emitting an x-ray, said x-ray generator comprising:
Dependencies are inferred from the claim text.