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AssigneeCorning Incorporated
InventorsDouglas C. Allan, Nicholas F. Borrelli, Charlene M. Smith, Bryan D. Stone
Estimating the term…
The invention provides a method of making a <194 nm wavelength calcium fluoride crystal optical lithography element for transmitting wavelengths less than about 194 nm along an optical axis with minimal birefringence by providing an optical element optical calcium fluoride crystal with an input face {100} crystal plane and forming the input face {100} crystal plane into an optical lithography element surface of an optical lithography element having an optical axis, with the optical axis aligned with a <100> crystal direction of the optical calcium fluoride crystal. In a preferred embodiment, the below 194 nm transmitting optical element is a <100>oriented calcium fluoride lens. In a preferred embodiment, the below 194 nm transmitting optical element is a <100> oriented calcium fluoride beam splitter.
A method of making a <194 nm calcium fluoride crystal optical lithography element for transmitting wavelengths less than about 194 nm along an optical axis with minimal birefringence, said method comprising:
A <194 nm calcium fluoride crystal optical lithography element for transmitting wavelengths less than 194 nm with minimal birefringence, said optical lithography element comprised of an optical calcium fluoride crystal with a {100} crystal plane and a <100> crystal direction, said optical element having an optical axis aligned with said <100> calcium fluoride crystal direction.
A method of making a fluoride crystal optical element for transmitting wavelengths less than about 194 nm along an optical axis with minimal birefringence, said method comprising:
An optical element for transmitting wavelengths less than about 194 nm with minimal birefringence, said optical element comprised of a cubic optical fluoride crystal with a {100} crystal plane and a <100> crystal direction, said optical element having an optical axis aligned with said <100> crystal direction.
A below 194 nm wavelength transmitting lens, said lens comprised of a cubic optical fluoride crystal with a {100} crystal plane and a <100> crystal direction, said lens having a curved optical surface and an optical axis, said optical axis aligned with said <100> crystal direction and normal to said {100} crystal plane.
A below 194 nm wavelength transmitting beam splitter cube, said beam splitter cube comprised of a cubic optical fluoride crystal with a {100} crystal plane and a <100> crystal direction, said beam splitter cube having a beam splitter cube face parallel to said {100} crystal plane and an optical axis aligned with said <100> crystal direction.
Dependencies are inferred from the claim text.