Scan exposure apparatus and method, and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorHiroaki Takeishi
Life of this patent
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Abstract
A scan exposure apparatus according to this invention determines a scan velocity and a focus measurement position from process conditions and the like and determines a threshold Δ of the focus measurement position on the basis of the scan velocity. The scan exposure apparatus executes focus measurement if a stage position falls within the range of the threshold Δ.
Claims13
A scan exposure apparatus comprising:
- a stage which moves while mounting a substrate thereon;
- a projection optical system which projects a pattern on said stage;
- a horizontal position measurement unit which measures a horizontal position of said stage;
- a measurement unit which measures a plane position of the substrate;
- and
- a controller which controls said stage so as to make an image plane of said projection optical system and a plane of the substrate coincide with each other on the basis of measurement result by said measurement unit if a deviation of the horizontal position of said stage measured by said horizontal position measurement unit during scan exposure from a predetermined position falls within a tolerance.
A scan exposure method in an exposure apparatus having a stage which moves while mounting a substrate thereon, a projection optical system which projects a pattern on the stage, a horizontal position measurement unit which measures a horizontal position of the stage, and a measurement unit which measures a plane position of the substrate, comprising
- the control step of controlling the stage so as to make an image plane of the projection optical system and a plane of the substrate coincide with each other on the basis of measurement result by the measurement unit if a deviation of the horizontal position of the stage measured by the horizontal position measurement unit during scan exposure from a predetermined position falls within a tolerance.
Dependencies are inferred from the claim text.