Integrated platen assembly for a chemical mechanical planarization
AssigneeApplied Materials, Inc.
InventorsTimothy J. Franklin, Dan A. Marohl
Life of this patent
Estimating the term…
Abstract
A method and apparatus for supporting a web of polishing material are generally provided. In one embodiment, an apparatus for supporting a web of polishing material includes a web of polishing media having a first portion disposed across a support surface of a platen assembly and a second portion wound on a first roll coupled to the platen assembly. A tensioning mechanism is coupled to the platen assembly and adapted to tension the web of polishing media in response to a diameter of the second portion of the web of polishing material wound on the first roll.
Claims25
An apparatus for supporting a web of polishing material, comprising:
- a platen assembly having a support surface;
- a web of polishing media having a first portion disposed across the support surface and a second portion wound on a first roll coupled to the platen assembly;
- and
- a tensioning mechanism coupled to the platen assembly and adapted to tension the web of polishing media in response to a diameter of the second portion of the web of polishing material wound on the first roll.
An apparatus for supporting a web of polishing material, comprising:
- a platen assembly having a support surface adapted to support a web of polishing material;
- a first motor coupled to a first side of the platen assembly and adapted to drive a supply roll having a first portion of the web wound thereon;
- a second motor coupled to a second side of the platen assembly and adapted to drive a take-up roll having a second portion of the web wound thereon;
- a torque sensor coupled to at least one of the first or second motor;
- and
- a first sensor coupled to the platen assembly and adapted to provide a metric indicative of a diameter of the supply or take-up roll having the torque sensor coupled thereto.
A method for supporting a web of polishing material, comprising:
- providing a web of polishing material disposed on a platen platen;
- driving a motor in a first direction coupled to a roll containing a first portion of the web;
- sensing a diameter of the roll;
- and
- adjusting a tension applied to the web in response to the sensed determined roll diameter.
Apparatus for supporting a polishing material on a platen of a chemical mechanical polishing, comprising:
- a top plate removable from the platen and having an upper surface;
- a gasket fixed to the upper surface and defining a center portion of the top surface, the center portion having a plurality of channels formed therein, at least one of the channels concentric with the gasket;
- and
- a vacuum port disposed through the top plate in fluid communication with the channels.
Apparatus for supporting a polishing material:
- a rotatable platen having a support surface adapted to support the polishing material;
- a port disposed in the platen and fluidly coupled to the support surface;
- a venturi fluidly coupled to and rotating with the platen and adapted for drawing a vacuum through the port disposed in the platen.
Dependencies are inferred from the claim text.