Strain sensor of little residual strain and method for fabricating it
AssigneeAlps Electric Co., Ltd.
InventorKunio Shinbo
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Abstract
For the metal substrate of a strain sensor, a Mo-containing two-phase stainless steel SUS329 is used. When an insulating layer, electrodes and a resistor are formed on the metal substrate by baking their materials, the alpha phase in the stainless steel of the metal substrate changes to a sigma phase through the baking heat, and, as a result, the range of strain applicable to the sensor within the elastic region of the substrate is broadened and the residual strain of the substrate is reduced. The strain sensor has a broad strain-detectable range and is readily restored to its starting point.
Claims8
A strain sensor which comprises a metal substrate, an insulating layer formed on the surface of the metal substrate, a resistor formed on the surface of the insulating layer, and electrodes connected to both ends of the resistor, respectively;
- wherein the metal substrate is formed of a stainless steel that contains from 16 to 26% by weight of Cr and from 2 to 6% by weight of Mo.
A method for producing a strain sensor, which comprises:
- (a) a step of forming a layer of a pasty glass material on the surface of a metal substrate of a stainless steel that contains from 16 to 26% by weight of Cr and from 2 to 6% by weight of Mo,
- (b) a step of baking the pasty glass material to form insulating layer,
- (c) a step of forming electrodes and a resistor on the insulating layer through baking their materials;
- wherein the baking temperature is not lower than 800° C. at least any one baking step of (b) and (c).
Dependencies are inferred from the claim text.