Integrated laser diode array and applications
OwnerKin Foeng Chan, Wenhui Mei +2inventors
InventorsKin Foeng Chan, Wenhui Mei, Jinhui Zhai, Akira Ishikawa
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Abstract
A system for performing digital lithography onto a subject is provided. The system includes a laser diode or LED array for generating and projecting a digital pattern. The array has a plurality of lasers which may be controlled either individually or as a group to produce the desired pattern. A lens system may then direct the digital pattern to the subject, thereby enabling the lithography.
Claims15
A system for performing digital lithography onto a subject, the system comprising:
- a laser diode array for generating a digital pattern, the array including a plurality of laser diodes operable to project at least one laser beam;
- and
- a lens system for directing the digital pattern to the subject.
A method for performing digital lithography onto a subject, the method comprising:
- generating a digital pattern using a laser diode array, the array including a plurality of laser diodes operable to project at least one laser beam;
- projecting the digital pattern using the at least one beam;
- and
- directing the projected digital pattern to the subject using a lens system.
A system for projecting a digital pattern onto a subject, the system comprising:
- a laser diode array for generating a digital pattern, the array including a plurality of laser diodes;
- and
- a lens system for directing the digital pattern to the subject.
A method for projecting a digital pattern onto a subject, the method comprising:
- generating a digital pattern using a laser diode array, the array including a plurality of laser diodes operable to project at least one laser beam;
- projecting the digital pattern using the at least one beam;
- and
- directing the projected digital pattern to the subject using a lens system.
Dependencies are inferred from the claim text.