Centrifuge and method for centrifuging a semiconductor wafer
AssigneeWacker Siltronic Gesellschaft fur Halbleitermaterialien AG
InventorsGEORG-FRIEDRICH HOHL, ROLAND BRUNNER, SUSANNE BAUER-MAYER, GUNTHER BRUNNER, HANS-JOACHIM LUTHE, FRANZ SOLLINGER
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Abstract
A centrifuge for a semiconductor wafer has a centrifuge plate for holding a semiconductor wafer, has a drive for setting the centrifuge plate in rotation, and has a device for supplying a medium to a front side and a rear side of the semiconductor wafer. The centrifuge has a housing which separates a centrifuging area and the semiconductor wafer from the environment, and a device for generating a laminar gas flow in the housing. A method for centrifuging a semiconductor wafer has the semiconductor wafer being centrifuged in a laminar gas flow.
Claims17
A centrifuge for a semiconductor wafer, comprising
- a housing which separates a centrifuging area and a semiconductor wafer from an external environment,
- a centrifuge plate for holding the semiconductor wafer;
- a drive for rotating the centrifuge plate;
- means for supplying a medium to a front side of said semiconductor wafer and to a rear side of said semiconductor wafer;
- and
- means for generating a laminar gas flow in the housing.
A method for centrifuging a semiconductor wafer comprising
- centrifuging a semiconductor wafer in a laminar gas flow;
- and
- supplying a medium to a front side of the semiconductor wafer and to a rear side of the semiconductor wafer.
Dependencies are inferred from the claim text.