Method for fabricating a thin film and apparatus for fabricating a thin film

Abstract

The back side space of a tubular member is evacuated by means of a pressure difference-creating means constructed of a pressure regulating chamber and a pump, and then, the pressure in the back side space of the tubular member is set to be tenth or below of the pressure in the front space of the tubular member. Then, a raw material gas is introduced and excited to generate a plasma raw material gas, which is introduced into the tubular member and onto an inner wall of the tubular member, efficiently commensurate with the pressure difference created by means of the pressure difference-creating means. As a result, a desired thin film is formed on the inner wall of the tubular member through the chemical reaction of the plasma raw material gas.

Dependencies are inferred from the claim text.