Surface texture measuring instrument and a method of adjusting an attitude of a work for the same

A surface texture measuring instrument of adjusting a surface of a work having a feature region along a fixed direction of the surface of the work, the instrument comprising:

• a stage for mounting thereon the work having the feature region along the fixed direction of the surface thereof in such a manner that the fixed direction of the surface of the work becomes substantially aligned with a Y axis;
• a detector for detecting a relative displacement of the work with respect to the detector in a Z axis substantially perpendicular to a surface of the work and perpendicular to the Y axis;
• a Y-axis moving unit for relatively moving the detector and the work in the Y axis direction;
• a X-axis moving unit for relatively moving the detector and the work in a X axis perpendicular to the Y axis and the Z axis, respectively in order to obtain a data of the feature region of the work;
• a storage unit for storing n (n≦2) sets of the data of the feature region of the work obtained by the detector moved by the X-axis moving unit;
• a data processing unit for calculating an amount of a relative attitude correction of the work with respect to the detector from determining n shape feature points from n sets of data on the feature region of the work and from determining a feature line connecting the n shape feature points;
• and
• a swivel unit for relatively rotating in a X-Y plane including the X axis and the Y axis the work and the detector on a basis of the amount of the relative attitude correction of the work.