Chemical amplifying type positive resist composition
OwnerJunji Nakanishi, Katsuhiko Namba +1inventors
InventorsJunji Nakanishi, Katsuhiko Namba, Masumi Suetsugu
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Abstract
A chemical amplifying type positive resist composition comprising (A) a resin becoming alkali-soluble due to the action of an acid, (B) an acid generating agent, (C) a basic compound, and (D) a polyvalent carboxylic acid ester is provided, and it exhibits higher resolution without impairing resist performance such as application ability and sensitivity
Claims9
A chemical amplifying type positive resist composition comprising (A) a resin becoming alkali-soluble due to the action of an acid, (B) an acid generating agent, (C) a basic compound, and (D) a polyvalent carboxylic acid ester.
Dependencies are inferred from the claim text.