Lifting support assembly for an exposure apparatus
AssigneeNikon Corporation
InventorMichael R. Sogard
Life of this patent
Estimating the term…
Abstract
A support assembly (12) for an exposure apparatus (10) includes a frame assembly (34), an elevator assembly (36) and a pivot assembly (38) for supporting at least one subassembly above an isolation base (32). The elevator assembly (36) selectively lifts the frame assembly (34) and the subassembly relative to the isolation base (32). Further, the pivot assembly (38) allows a portion of the frame assembly (34) and the subassembly to be rotated relative to the isolation base (32). As a result of this design, the subassemblies of the exposure apparatus (10) can be removed relatively easily for service and adjustment.
Claims50
A support assembly that supports a subassembly of an exposure apparatus relative to an isolation base, the support assembly comprising:
- a frame assembly that supports the subassembly;
- and
- an elevator assembly that selectively lifts a portion of the frame assembly and the subassembly relative to the isolation base.
A support assembly that supports a subassembly of an exposure apparatus relative to an isolation base, the support assembly comprising:
- a frame assembly that supports the subassembly;
- and
- a pivot assembly that allows a portion of the subassembly to pivot relative to the isolation base.
A method for making a support assembly for supporting a subassembly of an exposure apparatus above an isolation base, the method comprising the steps of:
- supporting the subassembly with a frame assembly;
- and
- selectively lifting a portion of the frame assembly and the subassembly relative to the isolation base with an elevation assembly.
A method for making a support assembly for supporting a subassembly of an exposure apparatus above an isolation base, the method comprising the steps of:
- supporting the subassembly with a frame assembly;
- and
- selectively pivoting a portion of the frame assembly and the subassembly relative to the isolation base with a pivot assembly.
The method of claim 44 wherein the step of supporting the subassembly includes the step of providing a first frame and a second frame and the method further comprises the steps of lifting the first frame relative to the second frame, and lifting the second frame relative to the first frame.
Dependencies are inferred from the claim text.