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US 2002/0163629 A1Published application
Methods and apparatus employing an index matching medium
OwnerMichael Switkes, Mordechai Rothschildinventors
Life of this patent
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Abstract
A perfluoropolyether (PFPE) index matching medium. The medium may be used with electromagnetic radiation having a wavelength below 220 nm. The medium may be used between two optical surfaces or between an optical surface and an object. The medium may be used as an immersion fluid in an immersion lithographic system.
Claims16
An optical system for transmitting light, comprising:
- an optical surface;
- and
- a PFPE medium contacting at least a portion of the optical surface, the PFPE medium configured to transmit at least a portion of the transmitted light.
An immersion lithographic system for projecting light having a wavelength less than 220 nanometers onto a resist covering at least a portion of a substrate, comprising:
- an optical surface;
- and
- an index matching medium contacting at least a portion of the optical surface, the index matching medium configured to transmit at least a portion of the light.
A method of transmitting light, comprising an act of:
- transmitting light through a PFPE medium.
Dependencies are inferred from the claim text.