Facilities connection bucket for pre-facilitation of wafer fabrication equipment
AssigneeApplied Materials, Inc.
InventorRonald Vern Schauer
Life of this patent
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Abstract
The present invention provides a standardized facilities box having a mechanism for mounting the box to a support pedestal of a semiconductor fabrication facility (i.e., a pedestal for supporting a semiconductor processing tool, or a support a pedestal of a support grid for a raised floor useable in a semiconductor device fabrication facility). The standardized facilities box includes one or more mechanisms that allow any of a set of add on features to be selectively coupled (i.e., for attachment at predetermined locations without machining) thereto. Other aspects include a facilities box having its own support leg, having a sensor, and/or having a lift/lower mechanism for lifting the facilities box or for lifting items to/from the facilities box.
Claims23
A standardized facilities box comprising:
- a box;
- a mechanism for mounting the box to a support pedestal of a semiconductor fabrication facility;
- and
- one or more mechanisms for selectively coupling any one of a set of add-on features within the box.
A facilities box comprising:
- a box;
- a mechanism for mounting the box to a raised floor tile of a semiconductor fabrication facility;
- and
- a support leg coupled to the box for supporting the box.
A facilities box comprising:
- a box adapted to house facilities connections therein;
- a mechanism for mounting the box to a support pedestal of a semiconductor fabrication facility;
- and
- a lifting mechanism coupled to the box adapted to lift and/or lower the box into or from a position for mounting the box to a support pedestal.
A facilities box comprising:
- a box adapted to house facilities connections therein;
- a mechanism for mounting the box to a support pedestal of a semiconductor fabrication facility;
- and
- a lifting mechanism adapted to lift and/or lower an item to or from the box.
A facilities box comprising:
- a box adapted to house facilities connections therein;
- a mechanism for mounting the box to a support pedestal of a semiconductor fabrication facility;
- and
- a sensor.
A facilities box comprising:
- a box adapted to house facilities connections therein;
- a mechanism for mounting the box to a support pedestal of a semiconductor fabrication facility;
- and
- an exhaust mechanism.
A facilities box comprising:
- a box adapted to house facilities connections therein;
- a mechanism for mounting the box to a support pedestal of a semiconductor fabrication facility;
- a cover coupled to the box;
- and
- a lockout mechanism adapted to lock the cover of the box.
A method of standardizing a semiconductor fabrication facility, comprising:
- indicating a location within a fabrication facility for installing a facilities box;
- providing a standardized facilities box having a mechanism for selectively coupling any one of a set of add-on features to the standardized facilities box;
- providing a plurality of add-on features;
- and
- specifying which add-on feature should be selectively coupled to which selective coupling mechanism of the standardized facilities box.
Dependencies are inferred from the claim text.