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US 2002/0160549 A1Published application
MEMS micro-relay with coupled electrostatic and electromagnetic actuation
AssigneeADC Telecommunications, Inc.
InventorsArunkumar Subramanian, Susan Bromley, Bradley J. Nelson, Karl Vollmers
Life of this patent
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Abstract
A micorelectromechanical relay and a method of fabricating the same that combines electrostatic actuation with electromagnetic actuation. The relay has very low contact resistance when the relay is in its ON state and enhanced contact-to-contact isolation when the relay is in its OFF state.
Claims17
A microelectromechanical relay comprising:
- a substrate layer having a trench formed therein;
- a first pair of contacts located in the trench of the substrate;
- a microelectromechanical actuator on the substrate for controllably establishing electrical contact between the first pair of contacts on the substrate, the actuator comprising:
- spaced apart supports on the substrate;
- a movable beam extending between the spaced apart supports;
- a contact cross bar located on the movable beam, the contact cross bar facing the first pair of contacts;
- means for deflecting the movable beam towards the first pair of contacts on the substrate;
- and
- means for bringing the cross bar in physical contact with the first pair of contracts.
6 more elements
A microelectromechanical relay comprising:
- a substrate having a trench formed therein;
- a first pair of contacts located in the trench of the substrate;
- a microelectromechanical actuator on the substrate for controllably establishing electrical contact between the first pair of contacts on the substrate, the actuator comprising:
- spaced apart supports on the substrate;
- a movable beam extending between the spaced apart supports;
- a contact cross bar located on the movable beam, the contact cross bar facing the fist pair of contacts;
- means for generating an electromechanical force on the movable beam to deflect the beam towards the substrate;
- and
- means for generating an electrostatic force between the beam and the substrate so that the contact cross bar is brought into physical contact with the first pair of contacts.
6 more elements
A microrelay comprising:
- a first electrode located on the movable beam;
- a second electrode located on the substrate, wherein the first electrode is at a different potential than the second electrode so that when the first and second electrodes are brought into close proximity to one another, an electrostatic force exists therebetween to bring the contact cross bar in contact with the first pair of electrodes;
- and
- current carrying coils located in the movable beam wherein when the relay is placed in a permanent magnetic field, an electromagnetic force is exerted on the movable beam to deflect the beam towards the pair of contacts close enough so that the electrostatic force takes over.
1 more element
A method of fabricating a microelectromechanical relay, the method comprising the steps of:
- (a) etching a deep trench anisotropically into a silicon substrate;
- (b) depositing an insulating film on the entire surface of the substrate;
- (c) depositing a conductive film on the insulating film;
- (d) etching away the conductive film deposited in step (c) to create a pair of contacts and an electrode in the deep trench;
- (e) filling deep trench with a sacrificial material;
- (f) polishing the deep trench to create a flat surface;
- (g) creating a beam layer over the deep trench;
- and
- (h) removing the sacrificial material.
6 more elements
Dependencies are inferred from the claim text.