Method and layout for high density reticle
AssigneeMicron Technology, Inc.
InventorWilliam Stanton
Life of this patent
Estimating the term…
Abstract
A method for making a reticle for use in a photolithography process is disclosed. The method includes forming at least two printable features and at least one sub-resolution connecting structure within the same layer of a reticle substrate, where the sub-resolution connecting structure connects at least two of the printable reticle features. The reticles themselves formed according to such methods as well as photolithographic processes using such a reticle are also disclosed. The reticle may be a binary mask, a phase shift mask, or an attenuated phase shift mask.
Claims72
A method for making a reticle for use in a photolithography process, comprising:
- forming at least two printable features on a reticle substrate;
- and
- forming at least one sub-resolution connecting structure on said reticle substrate, said sub-resolution connecting structure connecting at least two of said printable reticle features.
A method for designing a reticle, comprising:
- generating an initial reticle layout, said initial reticle layout comprising at least two printable reticle features;
- and
- generating a modified reticle layout, said modified reticle layout comprising said printable reticle features and at least one sub-resolution connecting structure, said sub-resolution connecting structure connecting at least two of said printable reticle features.
A photolithographic process, comprising:
- directing exposure onto a resist through a reticle, said reticle comprising a reticle substrate, at least two printable features on said reticle substrate, and at least one sub-resolution connecting structure on said reticle substrate, said sub-resolution connecting structure connecting at least two of said printable reticle features.
A reticle comprising a reticle substrate, at least two printable features on said reticle substrate, and at least one sub-resolution connecting structure on said reticle substrate, said sub-resolution connecting structure connecting at least two of said printable reticle features.
A computer readable storage medium containing a computer readable code for operating a computer to perform a method of designing a reticle, said method comprising:
- forming at least two printable features on a reticle substrate design;
- and
- forming at least one sub-resolution connecting structure on said reticle substrate design, said sub-resolution connecting structure connecting at least two of said printable reticle features.
A system, comprising:
- a computer readable storage medium containing program instructions for execution by a processor to design a reticle;
- and
- a processor in communication with said computer readable storage medium, said processor executing said program instructions stored on said computer readable storage medium to:
- form at least two printable features on a reticle substrate design;
- and
- form at least one sub-resolution connecting structure on said reticle substrate design, said sub-resolution connecting structure connecting at least two of said printable reticle features.
A computer program transmitted from a server computer to a computer system, said computer system comprising memory and a processor in communication with said memory, said memory containing the computer program, said computer program causing said processor to perform the acts of:
- forming at least two printable features on a reticle substrate design;
- and
- forming at least one sub-resolution connecting structure on said reticle substrate design, said sub-resolution connecting structure connecting at least two of said printable reticle features.
A system for designing a reticle comprising:
- a plurality of computer systems, each computer system comprising:
- a computer readable storage medium containing program instructions for execution by a processor to design and/or check a reticle;
- and
- a processor in communication with said computer readable storage medium, said processor executing said program instructions stored on said computer readable medium, said plurality of computer systems operating in conjunction with each other to form a reticle having:
- at least two printable features on a reticle substrate;
- and
- at least one sub-resolution connecting structure on said reticle substrate, said sub-resolution connecting structure connecting at least two of said printable reticle features;
- wherein each computer system processes different tasks associated with formation of said reticle.
A method for making a single-layer reticle for use in a photolithography process, comprising:
- forming a transparent substrate;
- forming patterns on said transparent substrate, said patterns resulting in at least two printable features and at least one sub-resolution connecting structure, where said sub-resolution connecting structure connects at least two of said printable reticle features.
A method for designing a reticle, comprising:
- generating an initial reticle layout, said initial reticle layout comprising at least two printable reticle features;
- generating a modified reticle layout, said modified reticle layout comprising said printable reticle features and at least one sub-resolution connecting structure, said sub-resolution connecting structure connecting at least two of said printable reticle features;
- checking said initial reticle layout to analyze differences between a pattern that will be produced by exposing a resist through said initial reticle and a desired circuit feature layout;
- and
- re-generating a further-modified reticle layout.
A photolithographic process, comprising:
- directing an exposure onto a resist through a reticle, said reticle comprising a reticle substrate, at least two printable features and at least one sub-resolution connecting structure on said reticle substrate, wherein at least two of said printable reticle features are connected by said sub-resolution connecting structure.
A reticle comprising:
- a reticle substrate having at least two printable features and at least one sub-resolution connecting structure formed thereon, said sub-resolution connecting structure connecting at least two of said printable reticle features.
A system for designing a reticle comprising:
- a plurality of computer systems, each computer system comprising:
- a computer readable storage medium containing program instructions for execution by a processor to design and/or check a reticle;
- and
- a processor in communication with said computer readable storage medium, said processor executing said program instructions stored on said computer readable medium, said plurality of computer systems operating in conjunction with each other to form a reticle having:
- at least two printable features and at least one sub-resolution connecting structure simultaneously formed within said reticle substrate, said sub-resolution connecting structure connecting at least two of said printable reticle features;
- wherein each computer system processes different tasks associated with the formation of said reticle.
Dependencies are inferred from the claim text.