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US 2002/0159879 A1Published application
Plant for processing wafers
AssigneeInfineon Technologies AG
InventorJurgen Elger
Life of this patent
Estimating the term…
Abstract
A plant for processing wafers, having a plurality of fabrication units, a plurality of measuring units, and a transport system for transporting the wafers. The fabrication units and the measuring units are each assigned a registration system. The feeding-in and discharge of the wafers to and from the respective fabrication unit or measuring unit can be registered in order to determine the wafer occupancy in the unit. Depending on this occupancy, a supply request or disposal request can be generated for the respective fabrication unit and measuring unit.
Claims22
A plant for processing wafers, comprising:
- a plurality of units, each one of said plurality of said units including a device selected from the group consisting of a fabrication unit and a measuring unit;
- and
- a transport system for transporting the wafers;
- each respective one of said plurality of said units including a loading and unloading station having at least one loading port for feeding in the wafers, a processing flap for closing said loading port, at least one unloading port for discharging the wafers, and a processing flap for closing said unloading port;
- each respective one of said plurality of said units including a registration system configured for registering a feeding-in and a discharging of the wafers to and from said respective one of said plurality of said units in order to determine a wafer occupancy in said respective one of said plurality of said units;
- for each respective one of said plurality of said units, a selected request being generated as a function of the wafer occupancy in said respective one of said plurality of said units, the selected request being selected from the group consisting of a supply request for said respective one of said plurality of said units and a disposal request for said respective one of said plurality of said units;
- said registration system of each respective one of said plurality of said units having a sensor configuration for registering a number of the wafers that are fed-in to said respective one of said plurality of said units and that are discharged from said respective one of said plurality of said units;
- said sensor configuration of said registration system of each respective one of said plurality of said units enabling registration of an actuation of said processing flap for closing said loading port of said respective one of said plurality of said units;
- and
- said sensor configuration of said registration system of each respective one of said plurality of said units enabling registration of an actuation of said processing flap for closing said unloading port of said respective one of said plurality of said units.
7 more elements
Dependencies are inferred from the claim text.