Method and apparatus for surface configuration measurement

A surface configuration measuring apparatus using, as testing optics, stereoscopic lattice type of moiré optics including a light source and a lattice pattern for producing moiré fringes and a light-sensitive device including a lens and a camera for picking up said moiré fringes, said camera comprising a pixel array, said surface configuration measuring apparatus comprising:

• a moving mechanism for moving said lattice pattern back and forth in a direction of an optical axis of said light-sensitive device for thereby shifting moiré fringes of a particular order by a preselected phase;
• synchronizing means for synchronizing a one-line scanning time of said light-sensitive device and a reciprocal movement of said lattice pattern;
• and
• data processing means for executing an arithmetic operation with at least three lines of moiré image data shifted in phase, which are produced by the one-line scanning time of said light-sensitive device and a reciprocal movement of said lattice pattern synchronous to each other, for thereby tridimensionally measuring a surface configuration of a work.

A surface configuration measuring apparatus using, as testing optics, stereoscopic lattice type of moiré optics including a light source and a lattice pattern for producing moiré fringes and a light-sensitive device including a lens and a camera for picking up said moiré fringes, said camera comprising a pixel array, said lattice pattern comprising a stepped lattice pattern having at least three lattice surfaces, which are different in height in a direction of an optical axis, for shifting moiré fringes of a particular fringe order by a preselected phase, said surface configuration measuring apparatus comprising:

• a moving mechanism for moving said stepped lattice pattern back and forth in a direction perpendicular to a direction of the optical axis of said light-sensitive device for thereby sequentially positioning said lattice surfaces on said optical axis;
• synchronizing means for synchronizing a one-line scanning time of said light-sensitive device and a reciprocal movement of said stepped lattice pattern;
• and
• data processing means for executing an arithmetic operation with at least three lines of moiré image data shifted in phase, which are produced by the one-line scanning time of said light-sensitive device and a reciprocal movement of said stepped lattice pattern synchronous to each other, for thereby tridimensionally measuring a surface configuration of a work.

A surface configuration measuring apparatus using, as testing optics, stereoscopic lattice type of moiré optics including a light source and a lattice pattern for producing moiré fringes and a light-sensitive device including a lens and a camera for picking up said moiré fringes, said camera comprising a color sensor camera, said surface configuration measuring apparatus comprising:

• a moving mechanism for moving said lattice pattern back and forth in a direction of an optical axis of said color sensor camera for thereby shifting moiré fringes of a particular fringe order by a preselected phase;
• filters of different colors positioned between a work and said color sensor camera;
• a switching mechanism for selectively positioning said color filters on the optical axis of said color sensor camera;
• synchronizing means for synchronizing a one-line or one-frame scanning time of said color sensor camera, a reciprocal movement of said lattice pattern and an operation of said switching mechanism;
• and
• data processing means for executing an arithmetic operation with at three colors of moiré image data shifted in phase, which are generated by the one-line or one-frame scanning time of said color sensor camera, the reciprocal movement of said lattice pattern and the operation of said switching mechanism, for thereby tridimensionally measuring a surface configuration of the work.

A surface configuration measuring apparatus using, as testing optics, stereoscopic lattice type of moiré optics including a light source and a lattice pattern for producing moiré fringes and a light-sensitive device including a lens and a camera for picking up said moiré fringes, said camera comprising a color sensor camera, said lattice pattern comprising a stepped lattice pattern having at least three lattice surfaces, which are different in height in a direction of an optical axis, for shifting moiré fringes of a particular fringe order by a preselected phase, said surface configuration measuring apparatus comprising:

• a moving mechanism for moving said stepped lattice pattern back and forth in a direction of the optical axis of said color sensor camera for thereby sequentially positioning lattice patterns of said lattice surfaces on said optical axis;
• color filters of different colors positioned between a work and said color sensor camera;
• a switching mechanism for selectively positioning said color filters on the optical axis of said color sensor camera;
• synchronizing means for synchronizing a one-line or one-frame scanning time of said color sensor camera, a reciprocal movement of said stepped lattice pattern and an operation of said switching mechanism;
• and
• data processing means for executing an arithmetic operation with three colors of moiré image data shifted in phase, which are produced by the one-line or one-frame scanning time of said color sensor camera, the reciprocal movement of said stepped pattern and the operation of said switching mechanism synchronous to each other, for thereby tridimensionally measuring a surface configuration of the work.

A surface configuration measuring apparatus using, as testing optics, stereoscopic lattice type of moiré optics including a light source and a lattice pattern for producing moiré fringes, said stepped lattice pattern having at least three lattice surfaces different in height in a direction of an optical axis for shifting fringes of a particular fringe order by a preselected phase, and a light-sensitive device including a lens and a camera for picking up said moiré fringes, said camera comprising three or more parallel lines of pixels each for picking up a work via a particular one of said lattice surfaces to thereby output a moiré image shifted in phase from said fringes of said particular fringe order by said preselected phase, said surface configuration measuring apparatus comprising:

• a mechanism for shifting a relative position between said moiré optics and a surface of the work;
• synchronizing means for synchronizing scanning times of said three lines of pixels of said camera;
• and
• data processing means for executing an arithmetic operation with at least three lines of moiré image data shifted in phase, which are generated by an operation of said mechanism and the scanning times of said three lines of pixels synchronous to each other, for thereby tridimensionally measure a configuration of the work.

A surface configuration measuring apparatus using, as testing optics, stereoscopic lattice type of moiré optics including a light source and a lattice pattern for producing moiré fringes, and a light-sensitive device including a lens and a camera for picking up said moiré fringes, said camera comprising at least three parallel lines of pixels, a surface of a work being parallel to and spaced by a same distance from said at least three parallel lines of pixels at a side opposite to said camera, said lattice pattern being not inclined in a direction in which said pixels are arranged, but being inclined in a direction in which said lines are arranged, such that each line of pixels is spaced by a particular distance from said lattice pattern to thereby pick up said surface of said work in a form of a particular moiré image shifted by a preselected phase, said surface configuration measuring apparatus comprising:

• a mechanism for moving a relative position between said moiré optics and the surface of the work in a direction in which said lattice pattern is inclined;
• synchronizing means for synchronizing scanning times of said at least three lines of pixels;
• and
• data processing means for executing an arithmetic operation with at least three lines of moiré image data shifted in phase, which are generated by an operation of said mechanism and the scanning times of said three lines of pixels synchronous to each other, for thereby tridimensionally measure a configuration of the work.

A surface configuration measuring apparatus using, as testing optics, stereoscopic lattice type of moiré optics including a light source and a lattice pattern for producing moiré fringes, and a light-sensitive device including a lens and a camera for picking up said moiré fringes, said camera comprising at least three parallel lines of pixels that are parallel to said lattice pattern, a surface of a work, which faces said camera with the intermediary of said lattice pattern, being parallel to and spaced by a same distance from said lattice pattern, said at least three lines of pixels each picking up a particular portion of said surface of said work as a visual field, said lattice pattern having different pitches each being assigned to a particular visual field such that each line of pixels output a moiré image shifted by a preselected phase, said surface configuration measuring apparatus comprising:

• a mechanism for moving a relative position between said moiré optics and the surface of the work in a direction in which said at least three lines of said camera are arranged;
• synchronizing means for synchronizing scanning times of said at least three lines of pixels;
• and
• data processing means for executing an arithmetic operation with at least three lines of moiré image data shifted in phase, which are generated by an operation of said mechanism and the scanning times of said three lines of pixels synchronous to each other, for thereby tridimensionally measure a configuration of the work.

A surface configuration measuring apparatus using, as testing optics, stereoscopic lattice type of moiré optics including a light source and a lattice pattern for producing moiré fringes, and a light-sensitive device including a lens and a camera for picking up said moiré fringes, said camera comprising at least three parallel lines of pixels that are parallel to said lattice pattern, a surface of a work being not inclined in a direction in which said pixels are arranged, but being inclined in a direction in which said lines are arranged, such that each line of pixels picks up a particular portion of said surface of said work spaced by a particular distance from said lattice pattern as a visual field to thereby pick up said portion in a form of a particular moiré image shifted by a preselected phase, said surface configuration measuring apparatus comprising:

• a mechanism for moving a relative position between said moiré optics and the surface of the work in a direction in which said surface is inclined;
• synchronizing means for synchronizing scanning times of said at least three lines of pixels;
• and
• data processing means for executing an arithmetic operation with at least three lines of moiré image data shifted in phase, which are generated by an operation of said mechanism and the scanning times of said three lines of pixels synchronous to each other, for thereby tridimensionally measure a configuration of the work.