Chamber assembly for an exposure apparatus

An exposure apparatus for transferring an image onto a device, the exposure apparatus comprising:

• a stage that retains the device;
• a stage mover assembly that moves the stage;
• and
• a chamber assembly that encircles the device and provides a device chamber around the device, the chamber assembly including a moving section that moves substantially concurrently with the stage.

A method for making a chamber assembly for an exposure apparatus that transfers an image onto a device, the exposure apparatus including a stage that retains the device and a stage mover assembly that moves the stage, the method comprising the steps of:

• providing a fixed section;
• providing a moving section that moves relative to the fixed section;
• and
• sealing an intersection between the fixed section and the moving section during movement of the moving section with a seal assembly.

A method for making a chamber assembly for an exposure apparatus that transfers an image onto a device, the exposure apparatus including a stage that retains the device and a stage mover assembly that moves the stage, the method comprising the steps of:

• providing a fixed section;
• providing a moving section that moves relative to the fixed section;
• and
• securing the moving section to the stage.