Piezoelectric/electrostrictive film element

Abstract

A lower electrode on a substrate is continuously formed from one thick portion at the periphery to a thin diaphragm portion. An auxiliary electrode is continuously formed from a position of the thin diaphragm portion independent of the lower electrode to the other thick portion at the periphery. A piezoelectric/electrostrictive film is formed over the lower electrode and auxiliary electrode. Since an incompletely bonded portion that can cause variation and time-dependent changes is not structured to extend over the thin diaphragm portion and the thick portions, it is possible to provide an element which has stable characteristics and which can be used under any condition. Further, since the incomplete bonded portion does not reside at ends of the thin diaphragm portion where the piezoelectric/electrostricitve film is likely to crack in the structure, it is possible to completely prevent the piezoelectric/electrostrictive film from cracking regardless of the type and characteristics of the film.

Dependencies are inferred from the claim text.