Negative actinic ray-sensitive paste and pattern-forming method by use of the same

Abstract

A negative actinic ray-sensitive paste prepared by adding a conductive powder and optionally a heat-fusable inorganic powder to a negative actinic ray-sensitive composition; and a pattern-forming method which comprises the following steps: (1a) a step of laminating the negative actinic ray-sensitive paste onto the surface of a substrate to form a paste film layer, (2a) a step of irradiating an actinic ray or heat ray through a mask or directly onto the surface of the paste film layer so as to obtain a predetermined pattern, and (3a) a step of removing the paste film layer by a developing treatment so as to obtain a predetermined pattern.

Dependencies are inferred from the claim text.