Wafer buffering system
OwnerRavinder Aggarwal, Ivo Raaijmakersinventors
Life of this patent
Estimating the term…
Abstract
Wafer buffering systems for use with a wafer processing system include a frame and wheel. The wheel includes a plurality of shelves for supporting a plurality of wafer carriers. The wheel is supported by the frame for rotation about a generally horizontal axis. The plane of the wheel faces a semiconductor processing system (e.g., a cluster tool) with an intervening wafer transfer robot located preferably between the wheel and the semiconductor processing system. A cassette transfer system moves cassettes from the wheel to a port for interfacing with the wafer transfer robot. In another arrangement, a horizontal carousel stocks cassettes above the processing system.
Claims31
A buffering system for use with a wafer processing system comprising:
- a frame;
- a first input/output (I/O) station for loading and unloading wafer carriers, each wafer carrier being configured for holding a plurality of wafers;
- a wheel, the wheel including a plurality of shelves, each shelf configured for supporting one of the wafer carriers, the wheel being supported for rotation on the frame about a generally horizontal axis;
- a drive mechanism that is configured to rotate the wheel about the generally horizontal axis;
- and
- a wafer carrier port that is communication with a wafer handling chamber.
A buffering system for use with a wafer processing system, comprising:
- a frame located substantially above the wafer processing system;
- an input/output (I/O) station for loading and unloading wafer carriers that are configured for holding a plurality of wafers;
- a wheel, including a plurality of shelves for supporting the wafer carriers, the wheel being supported for rotation on said frame about a generally vertical axis;
- and
- a drive mechanism that is configured to rotate the wheel about the generally vertical axis;
- and
- a wafer carrier port that is communication with a wafer handling chamber.
A buffering system for use with a wafer processing system, comprising a frame and a wheel, said wheel supporting a plurality of wafer carriers, said wheel being supported by said frame for rotation about a generally horizontal axis.
A buffering system for use with a wafer processing system, comprising a frame and a wheel, said wheel including plurality of positions for supporting a plurality of wafer carriers, said wheel being supported for rotation about a generally vertical axis and being located above the wafer processing system.
A method for providing wafers to a wafer processing system, comprising:
- loading a wafer carrier onto an input/output (I/O) station of a buffering system;
- transferring the wafer carrier to one of a plurality of shelves positioned on a wheel for rotation about a generally horizontal axis;
- rotating the wafer carrier about the generally horizontal axis;
- transferring the wafer carrier from the one of a plurality of shelves to a wafer carrier port;
- removing a wafer through the wafer carrier port;
- and
- transferring the wafer to a processing chamber.
Dependencies are inferred from the claim text.