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AssigneeThales
InventorsBertrand Leverrier, Marie-dominique Burni-Marchionni
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The invention relates to sensors of physical quantities such as pressure or acceleration sensors and, more specifically, to the mounting of the active part of the sensor on a base (30) bearing connection pins (32). According to the invention, an active part of the sensor is prepared. This active part is formed, for example, by micro-machined silicon wafers (10, 12) bearing electronic elements, electrical conductors and connection pads (22). A base (30) is thus prepared, provided with pins (32), and the pads (22) are electrically connected to the pin ends by conductive elements (wires 40). Then the wafer and the pin ends are plunged into an electrolytic bath so as to make an electrolytic deposit of conductive metal (42) on the pin ends, the pads and the conductive elements that connect them. Finally, this metal is oxidized or nitrized to constitute an insulating coat (44) on the connection pin ends, the pads and the conductive elements that connect them. Application to sensors of pressure, stresses, acceleration etc, designed to work in harsh environments.
Method for making a sensor of physical quantities consisting of the preparation of an active sensor part (10, 12) and a base (30), the active part comprising at least one wafer provided with conductive connection pads (22) on one face and the base being provided with conductive pins (32), the electrical connection of the pads and the pins by conductive elements (40) and then the plunging of the wafer and the pin ends into an electrolytic bath, the performance of an electrolytic deposition of at least one conductive metal (42) on the pin ends, the pads and the conductive elements that connect them and the performance of an oxidizing or nitrizing operation on this metal to make an insulating coat (44) on the connection pads, the connection pin ends and the conductive elements that connect them.
Method according to one of the above claims, characterized in that the electrolytically deposited conductive metal is nickel or tantalum or tungsten or molybdenum.
Sensor of physical quantities obtained by the method of one of the above claims, characterized in that it constitutes a sensor of pressure, stresses, acceleration, temperature, gas or liquid.
Dependencies are inferred from the claim text.