Method and device for controlling a crystal pulling apparatus
OwnerJoachim Aufreiterinventor
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OwnerJoachim Aufreiterinventor
Estimating the term…
The present invention relates to a method and device for controlling a crystal pulling apparatus while pulling a single crystal according to the Czochralski method. To this end, a crystal pulling apparatus is provided which has a vertically adjustable crucible, a heater surrounding at least a portion of the crucible, a pulling device operatively disposed over the crucible, and a control circuit operatively connected to the pulling device and the crucible. The heater is energized to form a molten mass in the crucible and the pulling device is actuated to pull a crystal from the molten mass. Through a control circuit, the crucible with the crystal can be adjusted in height relative to a heater, so that the upper edge of the heater juts to a greater or lesser degree over the crucible. The crystal pulling apparatus may also have a vertically adjustable funnel that surrounds the crystal and is positioned over and above the molten mass within the crucible leaving open a gap between a melt level of the molten mass and the lower edge of the funnel. This funnel is adjustable in height above the melt level by means of an actuator.
A method for pulling a crystal having a substantially constant diameter comprising the steps of:
A crystal pulling apparatus for pulling a crystal having a substantially constant diameter from a molten mass, the apparatus comprising:
Dependencies are inferred from the claim text.