Self-supporting adaptable metrology device

A system, comprising:

• a load port for a semiconductor product handling/processing tool, the semiconductor product handling/processing tool enclosing a mini-environmental atmosphere and having a load port table for supporting devices to be coupled to said load port;
• and
• a metrology device couplable to said load port, said metrology device containing:
• a housing preserving an inner atmosphere;
• a coupling region for connecting said inner atmosphere to the mini-environmental atmosphere and extending from said housing;
• a measuring device for measuring a property of a semiconductor product;
• a transport device;
• a support supported by and movable over ground by said transport device, said support supporting said housing and said measuring device, said support dimensioned such that the metrology device being self-supporting in a position appropriate for coupling said coupling region to said load port, said metrology device thereby being couplable to said load port without being supported by the load port table.