Adjusting apparatus for devices and for setting adjustments
AssigneeCarl Zeiss SMT GmbH
InventorsKlaus-Dieter Klein, Thomas Petasch, Hartmut Muenker
Life of this patent
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Abstract
An apparatus for adjusting devices and for setting adjustments, in particular in a μm range, nm range and below, in particular of optical elements in semiconductor lithography, comprising a base part and a head part spaced apart therefrom., the two parts being connected to one another by at least one adjustment device, and the adjustment device having side parts, the angle of which, or the spacing between which, can be adjusted or see by a length-adjustment device.
Claims29
Adjusting apparatus for devices and for setting adjustments, in a μm range, nm range and below, comprising a base part and a head part spaced apart therefrom, the two parts being connected to one another by at least one adjustment device, and the adjustment device having side parts, the angle of which, or the spacing between which, can be adjusted or set by a length-adjustment device.
Adjusting apparatus for devices and for setting adjustments, in a μm range, nm range and below, comprising a base part and a head part spaced apart therefrom, the two parts being connected to one another by at least one adjustment device, and the adjustment device having side parts, the angle of which, or the spacing between which, can be adjusted or set by a length-adjustment device, wherein the length-adjustment device has a transverse part which is clamped between the mutually opposite side parts.
Adjusting apparatus for devices and for setting adjustments, in a μm range, nm range and below, comprising a base part and a head part spaced apart therefrom, the two parts being connected to one another by at least one adjustment device, and the adjustment device having side parts, the angle of which, or the spacing between which, can be adjusted or set by a length-adjustment device, wherein the length-adjustment device is provided with temperature-compensation members.
Adjusting apparatus for devices and for setting adjustments, in a μm range, nm range and below, comprising a base part and a head part spaced apart therefrom, the two parts being connected to one another by at least one adjustment device, and the adjustment device having side parts, the angle of which, or the spacing between which, can be adjusted or set by a length-adjustment device, wherein a precision-adjustment device is provided in addition to the adjustment device.
Adjusting apparatus for devices and for setting adjustments, in a μm range, nm range and below, comprising a base part and a head part spaced apart therefrom, the two parts being connected to one another by at least one adjustment device, and the adjustment device having side parts, the angle of which, or the spacing between which, can be adjusted or set by a length-adjustment device, wherein a precision-adjustment device is provided in addition to the adjustment device, wherein additionally a precision-adjustment device is provided with at least two at least more or less parallel limbs, and wherein the spacing between the base part and the head part can be changed by a precision-setting member, which is located between the limbs and which bends them either inwards or outwards.
Dependencies are inferred from the claim text.