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US 2002/0119589 A1Published application
Method of manufacturing a micromechanical component
AssigneeRobert Bosch GmbH
InventorsFrank Fischer, Wilhelm Frey, Udo Bischof, Lars Metzger
Life of this patent
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Abstract
A method of manufacturing a micromechanical component has the steps: providing a substrate having a front side and a back side; structuring the front side of the substrate; at least partially covering the structured front side of the substrate with a protective layer containing germanium; structuring the back of the substrate; and at least partially removing the protective layer containing germanium from the structured front side of the substrate.
Claims9
A method of manufacturing a micromechanical component, the method comprising:
- providing a substrate having a front side and a back side;
- patterning the front side of the substrate;
- at least partially covering the patterned front side of the substrate with a protective layer containing germanium;
- patterning the back side of the substrate;
- and
- at least partially removing the protective layer containing germanium from the patterned front side of the substrate.
3 more elements
Dependencies are inferred from the claim text.