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US 2002/0119391 A1Published application
Polymer and photoresist compositions
AssigneeShipley Company, L.L.C.
InventorsGeorge G. Barclay, Anthony Zampini
Life of this patent
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Abstract
Disclosed are polymers containing as polymerized units one or more cyclic olefin monomers having fused cyclic electron withdrawing groups, methods of preparing such polymers, photoresist compositions including such polymers as resin binders and methods of forming relief images using such photoresist compositions.
Claims20
A polymer including as polymerized units one or more cyclic olefin monomers of the formula I or II
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- wherein A═O, S, CR7R8, and NR5;
- R5=phenyl, substituted phenyl, benzyl, substituted benzyl, (C1-C8)alkyl and substituted (C1-C8)alkyl;
- Z═O, S, and NR6;
- R6═(C1-C8)alkyl and substituted (C1-C8)alkyl;
- R7 and R8 are independently selected from H, (C1-C6)alkyl, and substuituted (C1-C6)alkyl;
- E and W are independently selected from a chemical bond, O, S and NR6;
- R1, R2, R3 and R4 are independently selected from H, (C1-C4)alkyl, (C1-C4)alkoxy and halo;
- T and L are taken together and selected from a double bond or a 5 to 8-membered unsaturated ring;
- n=0 to 3;
- m=0 to 2;
- m′=0 to 2;
- l=0 to 3;
- p=0 to 3;and x=0 to 3;provided that m+m′=0 to 2;
- provided that l+p=0 to 3;
- provided that when A═O, S or NR1, n=1;
- provided that when one of E and W is a chemical bond l+p=1 to 3;
- provided that at least one of E and W is O, S or NR6;
- and optionally one or more ethylenically or acetylenically unsaturated monomers.
16 more elements
A method of polymerizing one or more cyclic olefin monomers of formula I or II
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- wherein A═O, S, CR7R8, and NR5;
- R5=phenyl, substituted phenyl, benzyl, substituted benzyl, (C1-C8)alkyl and substituted (C1-C8)alkyl;
- Z═O, S, and NR6;
- R6═(C1-C8)alkyl and substituted (C1-C8)alkyl;
- R7 and R8 are independently selected from H, (C1-C6)alkyl, and substuituted (C1-C6)alkyl;
- E and W are independently selected from a chemical bond, O, S and NR6;
- R1, R2, R3 and R4 are independently selected from H, (C1-C4)alkyl, (C1-C4)alkoxy and halo;
- T and L are taken together and selected from a double bond or a 5 to 8-membered unsaturated ring;
- n=0 to 3;
- m=0 to 2;
- m′=0 to 2;
- l=0 to 3;p=0 to 3;
- and x=0 to 3;
- provided that m+m′=0 to 2;
- provided that l+p=0 to 3;
- provided that when A═O, S or NR1, n=1;
- provided that when one of E and W is a chemical bond l+p=1 to 3;
- provided that at least one of E and W is O, S or NR6;
- and optionally one or more ethylenically or acetylenically unsaturated monomers;
- including the step of contacting the one or more cyclic olefin monomers with one or more catalysts selected from palladium(II) polymerization catalyst, nickel(II) polymerization catalyst and free radical polymerization catalyst.
18 more elements
Dependencies are inferred from the claim text.