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US 2002/0119036 A1Published application
Installation for fabricating semiconductor products
OwnerRonald Huber, Rolf-Arno Klabschinventors
Life of this patent
Estimating the term…
Abstract
An installation for fabricating semiconductor products includes a transport system for supplying the semiconductor products to fabrication units in a clean room. A portal crane installation includes at least one transport container which is guided above the fabrication units and which can be lowered to the fabrication units.
Claims25
An installation for fabricating semiconductor products, comprising:
- fabrication units configured to operate in a clean room;
- a transport system including a portal crane installation for supplying the semiconductor products to said fabrication units, said portal crane installation including two parallel crane tracks and a carrier, said two parallel crane tracks extending above said fabrication units, said carrier extending transverse to said two parallel crane tracks, and said carrier having longitudinal ends movably mounted in said two parallel crane tracks;
- and
- a transport container movably mounted to said carrier such that said transport container is guidable over said fabrication units and is lowerable to said fabrication units.
1 more element
A plant for fabricating semiconductor products, comprising:
- a clean room;
- fabrication units disposed in said clean room;
- a transport system including a portal crane installation for supplying the semiconductor products to said fabrication units, said portal crane installation including two parallel crane tracks and a carrier, said two parallel crane tracks extending above said fabrication units, said carrier extending transverse to said two parallel crane tracks, and said carrier having longitudinal ends movably mounted in said two parallel crane tracks;
- and
- a transport container movably mounted to said carrier such that said transport container is guidable over said fabrication units and is lowerable to said fabrication units.
2 more elements
Dependencies are inferred from the claim text.