Method and apparatus for printing patterns on substrates
AssigneeCreo Inc.
InventorsOz Cabiri, Hai Benron
Life of this patent
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Abstract
A method and apparatus for printing a pattern on a substrate, by applying a photoresist layer over the substrate; locating a laser direct-imagining exposure head to print the pattern on the substrate by the application of one or more laser beams to the photoresist layer on the substrate while relative movement is effected between the exposure head and the substrate; and controlling the drive and the exposure head to cause the exposure head to print a first portion of the pattern on a first portion of the substrate at a first (normal) resolution, and a second portion of the pattern on a second portion of the substrate at a second (higher) resolution.
Claims17
A method of printing a pattern on a substrate, comprising:
- applying a photoresist layer over said substrate;
- locating a laser direct-imaging exposure head with respect to said substrate to print said pattern on the substrate by the application of laser energy to the photoresist layer on the substrate while relative movement is effected between said exposure head and said substrate by a drive;
- defining a first portion of the substrate to be printed with a first portion of the pattern at a first resolution, and a second portion of the substrate to be printed with a second portion of the pattern at a second, higher resolution;
- and controlling said drive and said exposure head to cause the exposure head to print said first portion of the pattern on said first portion of the substrate at said first resolution, and said second portion of the pattern on said second portion of the substrate at said second, higher resolution.
Apparatus for printing a pattern on a photoresist layer carried by a substrate, comprising:
- a holder for carrying said substrate;
- a laser direct-imaging exposure head mounted with respect to said holder to print said pattern on the photoresist layer of the substrate when the substrate is carried by said holder;
- a drive for effecting relative movement between said exposure head and said substrate;
- and a controller programmed to enable:
- defining a first portion of the substrate to be printed with a first portion of the pattern at a first resolution, and a second portion of the substrate to be printed with a second portion of the pattern at a second, higher resolution;
- and controlling said drive and said exposure head to cause the exposure head to print said first portion of the pattern on said first portion of the substrate at said first resolution, and said second portion of the pattern on said second portion of the substrate at said second, higher resolution.
Dependencies are inferred from the claim text.