US 2002/0117792 A1 · Wafer chuck having a removable insert

Abstract

A vacuum chuck/insert assembly (100) for firmly supporting a semiconductor wafer (106) during wafer processing. The vacuum chuck comprises a chuck (102) and a removable insert (104). The chuck includes a base (108) and a plurality of spacers (112) for holding the insert in spaced relationship to the base of the chuck. The chuck further includes first and second vacuum seals (116, 118) and vacuum ports (128) extending through the base of the chuck. The insert includes a base (132) and a plurality of spacers (136) for holding the wafer in spaced relationship to the base of the insert. The insert further includes a vacuum seal (140) and vacuum ports (146) extending through the base of the insert. During operation, vacuum applied to the vacuum chuck/insert assembly holds the insert firmly in contact with the chuck and the wafer firmly in contact with the insert.

Claims20

Dependent claims

A chuck/insert assembly for holding a workpiece, comprising:

a chuck that includes:
a first base having a first surface;
and at least one first spacer extending away from said first surface;
and an insert removably engaged with said at least one first spacer so as to form a first vacuum region between said insert and said chuck, said insert including:a second base having a second surface;
and at least one second spacer extending away from said second surface and having a distal end located opposite said second surface, said distal end adapted for engaging the workpiece.

2 more elements

Dependencies are inferred from the claim text.

Wafer chuck having a removable insert

Life of this patent

Wafer chuck having a removable insert

Life of this patent

Abstract

Claims20