Ferroelectric transistor and memory cell configuration with the ferroelectric transistor
AssigneeInfineon Technologies AG
InventorsReinhard Stengl, Hans Reisinger, Thomas Haneder, Harald Bachhofer
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AssigneeInfineon Technologies AG
InventorsReinhard Stengl, Hans Reisinger, Thomas Haneder, Harald Bachhofer
Estimating the term…
A first source-drain region, a channel region, and a second source-drain region are arranged one after another in a semiconductor substrate. At least the surface of the channel region and parts of the first source-drain region are covered by a dielectric layer. A ferroelectric layer is disposed on the surface of the dielectric layer between two polarization electrodes. A gate electrode is arranged on the surface of the dielectric layer. The thickness of the dielectric layer is dimensioned such that a remanent polarization of the ferroelectric layer, which is aligned between the two polarization electrodes, produces compensation charges in part of the channel region. The ferroelectric transistor is suitable as a memory cell for a memory cell configuration.
A ferroelectric transistor, comprising:
Dependencies are inferred from the claim text.