Resilient contact structures formed and then attached to a substrate
AssigneeFormFactor, Inc.
InventorsBenjamin Niles Eldridge, Gary William Grube, Igor Yan Khandros, Gaetan L. Mathieu
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AssigneeFormFactor, Inc.
InventorsBenjamin Niles Eldridge, Gary William Grube, Igor Yan Khandros, Gaetan L. Mathieu
Estimating the term…
Contact structures exhibiting resilience or compliance for a variety of electronic components are formed by bonding a free end of a wire to a substrate, configuring the wire into a wire stem having a springable shape, severing the wire stem, and overcoating the wire stem with at least one layer of a material chosen primarily for its structural (resiliency, compliance) characteristics. A variety of techniques for configuring, severing, and overcoating the wire stem are disclosed. In an exemplary embodiment, a free end of a wire stem is bonded to a contact area on a substrate, the wire stem is configured to have a springable shape, the wire stem is severed to be free-standing by an electrical discharge, and the free-standing wire stem is overcoated by plating. A variety of materials for the wire stem (which serves as a falsework) and for the overcoat (which serves as a superstructure over the falsework) are disclosed. Various techniques are described for mounting the contact structures to a variety of electronic components (e.g., semiconductor wafers and dies, semiconductor packages, interposers, interconnect substrates, etc.), and various process sequences are described. The resilient contact structures described herein are ideal for making a “temporary” (probe) connections to an electronic component such as a semiconductor die, for burn-in and functional testing. The self-same resilient contact structures can be used for subsequent permanent mounting of the electronic component, such as by soldering to a printed circuit board (PCB). An irregular topography can be created on or imparted to the tip of the contact structure to enhance its ability to interconnect resiliently with another electronic component. Among the numerous advantages of the present invention is the great facility with which the tips of a plurality of contact structures can be made to be coplanar with one another. Other techniques and embodiments, such as wherein the falsework wirestem protrudes beyond an end of the superstructure, or is melted down, and wherein multiple free-standing resilient contact structures can be fabricated from loops, are described.
Method of fabricating an electrical contact structure, comprising:
Method of electrically interconnecting two electronic components, comprising:
Method of fabricating an interposer, comprising:
Method of mounting a plurality of contact structures to an electronic component, comprising:
Method of performing testing selected from the group consisting of test and burn-in on a semiconductor device, comprising:
Method of temporarily connecting to a semiconductor device prior to permanently connecting to the semiconductor device, comprising:
Electrical connection between two electronic components, comprising:
Electronic assembly, comprising:
Method of creating a superstructure on a falsework, comprising:
Method of tailoring the thickness of a plating, comprising:
A method of making two or more free-standing resilient contact structures, comprising:
A method for mounting a protuberant conductive contact to an electronic component, the method comprising the sequential steps of:
A method for mounting a protuberant conductive contact to an electronic component, the method comprising the sequential steps of:
A method for mounting a protuberant conductive contact to a conductive terminal on an electronic component, the method comprising the sequential steps of:
A method for mounting a protuberant conductive contact to a conductive terminal on an electronic component, the method comprising the sequential steps of:
A method for mounting a protuberant conductive contact to a conductive terminal on an electronic component, the method comprising the sequential steps of:
A method for mounting a protuberant conductive contact to a conductive terminal on an electronic component, the method comprising the sequential steps of:
A method for mounting a protuberant conductive contact to a conductive terminal on an electronic component, the method comprising the sequential steps of:
Method of forming a resilient contact structure extending from a surface of an electronic component, comprising:
Method for manufacturing a conductive contact on an electronic component, comprising:
Method for manufacturing electrical contacts on a surface of an electronic component, comprising, for each raised electrical contact:
Method of connecting a first electronic component to a second electronic component, comprising:
Method of making a temporary connection between a first electronic component and a second electronic component, and subsequently making a permanent connection between the first electronic component and a third electronic component, comprising:
Interposer, comprising:
Interposer, comprising:
Interposer, comprising:
Method of manufacturing shaped contact structures, comprising:
Semiconductor package, comprising:
Semiconductor device, comprising:
Semiconductor device, comprising:
Method of assembling an electronic assembly, comprising:
Method of mounting a free-standing contact structure to an electronic component, comprising:
Method of performing wirebonding, comprising:
Method of forming a ball at an end of a wirebond wire, comprising:
Method of performing wirebonding, comprising:
Method of making engineering changes in an interposer having a first plurality of contact structures extending from a first side of a substrate and a second plurality of contact structures extending from a second side of the substrate, comprising:
Dependencies are inferred from the claim text.