Semiconductor substrate processing tool and fabrications facilities intergration plate

Abstract

An apparatus and method for installing a plurality of facilities conduits in a wafer fabrication facility for subsequent coupling to a wafer-processing tool. The apparatus comprises a facilities integration plate and a gauge fixture removably inserted within the facilities integration plate. The method comprises the steps of determining a location where the wafer-processing tool is positioned in the wafer fabrication facility, forming a cutout in a floor of the fabrication facility, and providing the plurality of facilities conduits through the cutout in the floor. The facilities integration plate is mounted within the cutout in the floor, and the gauge fixture is disposed within the facilities integration plate. The facilities conduits are sized to a length defined by the gauge fixture and the wafer-processing tool is coupled to the plurality of facilities conduits.

Dependencies are inferred from the claim text.