System for supplying semiconductor manufacturing system control programs
AssigneeHitachi Kokusai Electric Inc.
InventorMinoru Nakano
Life of this patent
Estimating the term…
Abstract
A system for supplying a semiconductor manufacturing system control program includes an administrative server, a communications circuit connecting the administrative server to a controller of a semiconductor manufacturing system, a facility provided in the controller for determining a time when a previously installed control program can be changed, and a facility provided in the controller responsive to a result of the determination for storing a new control program received from the administrative server through the communications circuit in a memory to be executable by a processor.
Claims12
A system for supplying a semiconductor manufacturing system control program comprising:
- an administrative server;
- a communications circuit connecting the administrative server to a controller of a semiconductor manufacturing system;
- a facility provided in the controller for determining a time when a previously installed control program can be changed;
- and
- a facility provided in the controller responsive to a result of the determination for storing a control program received from the administrative server through the communications circuit in a memory to be executable by a processor.
A system for supplying a semiconductor manufacturing system control program comprising:
- an administrative server;
- a communications circuit connecting the administrative server to a controller of a semiconductor manufacturing system;
- a facility provided in the controller for receiving input of a control program change instruction from a user of the semiconductor manufacturing system;
- and
- a facility provided in the controller responsive to a control program change instruction for storing a control program received from the administrative server through the communications circuit in a memory to be executable by a processor.
A system for supplying semiconductor manufacturing system control programs comprising:
- an administrative server;
- a communications circuit connecting the administrative server to a controller of a semiconductor manufacturing system;
- a facility provided in the controller for receiving input of a control program change instruction from the administrative server through the communications circuit;
- and
- a facility provided in the controller responsive to a control program change instruction for storing a control program received from the administrative server through the communications circuit in a memory to be executable by a processor.
A method for supplying a semiconductor manufacturing system control program through a communications circuit to a controller for controlling operation of a semiconductor manufacturing system by executing a control program, the system comprising:
- a step of transmitting a control program through a communications circuit to a controller of a semiconductor manufacturing system;
- and
- a step, effected at a time when the semiconductor manufacturing system is in an operating state permitting a previously installed control program to be changed, of storing the transmitted control program to be executable by the controller.
A method for supplying a semiconductor manufacturing system control program through a communications circuit to a controller for controlling operation of a semiconductor manufacturing system by executing a control program, the system comprising:
- a step of transmitting a control program through a communications circuit to a controller of the semiconductor manufacturing system;
- and
- a step of executing the transmitted new control program in the controller using data used to execute an old control program.
An administrative server for supplying a semiconductor manufacturing system control program through a communications circuit to a controller for controlling operation of a semiconductor manufacturing system by executing a control program, the administrative server comprising:
- a facility for transmitting a control program through a communications circuit to a controller for, at a time when the semiconductor manufacturing system is in an operating state permitting a previously installed control program to be changed, storing the received control program in a memory of the controller to be executable by the controller.
An administrative server for supplying a semiconductor manufacturing system control program through a communications circuit to a controller for controlling operation of a semiconductor manufacturing system by executing a control program, the administrative server comprising:
- a facility for transmitting a control program through a communications circuit to a controller for enabling the controller to execute the received new control program using data used to execute an old control program.
A semiconductor manufacturing system controller for controlling operation of a semiconductor manufacturing system by executing a control program, the controller comprising:
- a facility for determining a time when a previously installed control program can be changed;
- and
- a facility responsive to a result of the determination for storing a control program received through a communications circuit in a memory to be executable by a processor.
A semiconductor manufacturing system controller for controlling operation of a semiconductor manufacturing system by executing a control program, the controller comprising:
- a facility for retaining existing data used to execute a replaced control program;
- and
- a facility for executing a new control program received through a communications circuit using the existing data
Dependencies are inferred from the claim text.