Measuring system for performance of imaging optical system

A projection exposure apparatus for performing projection exposure by use of an imaging optical system, said apparatus comprising:

• an imaging optical system;
• an interferometer arranged to measure transmission wavefronts separately or sequentially, in relation to at least one of plural measurement points defined along a plane perpendicular to an optical axis of the imaging optical system, wherein position coordinates of object side and image side imaging points of the plural measurement points are measured;
• and
• a computing unit being communicated with said interferometer, said computing unit being operable to calculate a wavefront as measured by said interferometer and at least one of a wavefront aberration and an imaging state of the imaging optical system, and said computing unit being operable to correct a measured value related to at least one of a wavefront aberration and an imaging state of the imaging optical system at another measurement point, while taking, as a reference, at least one of a wavefront aberration and an imaging state at a standard point set along a plane perpendicular to the optical axis.

A projection exposure apparatus for performing projection exposure by use of an imaging optical system, said apparatus comprising:

• an imaging optical system;
• an interferometer arranged to measure transmission wavefronts separately or sequentially, in relation to at least one of plural measurement points defined along a plane perpendicular to an optical axis of the imaging optical system, wherein position coordinates of object side and image side imaging points of the plural measurement points are measured;
• and
• a computing unit being communicated with said interferometer, said computing unit being operable to calculate a wavefront as measured by said interferometer and at least one of a wavefront aberration and an imaging state of the imaging optical system, and said computing unit being operable to correct at least one of distortion and a focal plane at another measurement point of the imaging optical system, while taking, as a reference, at least one of distortion and a focal plane at a standard point set along a plane perpendicular to the optical axis.

A method of measuring performance of an imaging optical system by use of an interferometer, said method comprising the steps of:

• measuring, by use of the interferometer, transmission wavefronts separately or sequentially, in relation to at least one of plural measurement points defined along a plane perpendicular to an optical axis of the imaging optical system, wherein position coordinates of object side and image side imaging points of the plural measurement points are measured;
• calculating a wavefront as measured by the interferometer and at least one of a wavefront aberration and an imaging slate of the imaging optical system;
• and
• correcting a measured value related to at least one of a wavefront aberration and an imaging state of the imaging optical system at another measurement point, while taking, as a reference, at least one of a wavefront aberration and an imaging state at a standard point set along a plane perpendicular to the optical axis.

A method of measuring performance of an imaging optical system by use of an interferometer, said method comprising the steps of:

• measuring, by use of the interferometer, transmission wavefronts separately or sequentially, in relation to at least one of plural measurement points defined along a plane perpendicular to an optical axis of the imaging optical system, wherein position coordinates of object side and image side imaging points of the plural measurement points are measured;
• calculating a wavefront as measured by said interferometer and at least one of a wavefront aberration and an imaging state of the imaging optical system;
• and
• correcting at least one of distortion and a focal plane at another measurement point of the imaging optical system, while taking, as a reference, at least one of distortion and a focal plane at a standard point set along a plane perpendicular to the optical axis.