Method and device for manufacturing ceramics, semiconductor device and piezoelectric device
AssigneeSeiko Epson Corporation
InventorEiji Natori
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Abstract
A method for manufacturing ceramics includes a step of forming a ceramic film on a substrate by mixing a fine particle of a raw material species which becomes at least part of raw materials for ceramics with an active species, and feeding the mixed fine particle and active species to the substrate. A manufacture device includes a disposing section which also serves as a heating section for a substrate, a raw material species feeding section for feeding a fine particle of a raw material species, an active species feeding section for feeding an active species, and a mixing section for mixing the raw material species and the active species.
Claims33
A method for manufacturing ceramics comprising a step of forming a ceramic film on a substrate by mixing a fine particle of a raw material species which becomes at least part of raw materials for ceramics with an active species, and feeding the mixed fine particle and active species to the substrate.
A device for manufacturing ceramics comprising:
- a disposing section for a substrate on which ceramics is formed;
- a heating section for heating the substrate to a given temperature;
- a raw material species feeding section for feeding a fine particle of a raw material species which becomes at least part of the raw materials for the ceramics;
- an active species feeding section for feeding an active species;
- and
- a mixing section for mixing the raw material species fed from the raw material species feeding section and the active species fed from the active species feeding section,
- wherein a film formation is performed by mixing the raw material species and the active species and feeding the mixed raw material species and active species to the substrate.
Dependencies are inferred from the claim text.